新基于工控机和plc的真空磁控溅射镀膜设备控制系统设计.doc

摘  要：磁控溅射镀膜技术在薄膜制备领域广泛应用，控制系统的设计对磁控溅射镀膜设备的稳定运行有着重要的影响。本文介绍了基于嵌入式一体化工控机和PLC的真空磁控溅射镀膜设备电气自动控制系统的硬件构成、系统原理、系统功能以及设计思路及方法。并重点叙述了OMRON CJ系列PLC在控制系统中的应用。

关键词：可编程控制器；工控机；磁控溅射

Design of Electrical Control System of the Vacuum Magnetron Sputtering Deposition 

on Industry control computer and PLC

    Abstrack:  The technology of Vacuum Magnetron Sputtering Deposition is wide used on the field of thin film manufacture. The design of Control system is very significant to MS system. The article intends to explain the electrical automatic control system of MS equipment on Industry control computer and PLC, including hardware structure, work theory, system function and the method of design. And the application of PLC to OMRON CJ1 series is described mostly in detail.

     Key Words:  PLC (Programmable logic Controller); Industry control computer; MS (Magnetron Sputtering);